露点/相对湿度百分比/ppmRH对照表 | |||
露点仪显示湿度 | 相对湿度百分比RH/%(21.12℃环境之下) | 露点仪显示湿度 | 相对湿度百分比RH/%(21.12℃环境之下) |
-100 | 0.000053 | -40 | 0.516 |
-98 | 0.000080 | -38 | 0.644 |
-98 | 0.00012 | -36 | 0.804 |
-94 | 0.00018 | -34 | 1.00 |
-92 | 0.00026 | -32 | 1.24 |
-90 | 0.00037 | -30 | 1.52 |
-88 | 0.00054 | -28 | 1.88 |
-86 | 0.00075 | -26 | 2.30 |
-84 | 0.00107 | -24 | 2.81 |
-82 | 0.00155 | -22 | 3.41 |
-80 | 0.00214 | -20 | 4.13 |
-78 | 0.00300 | -18 | 5.00 |
-76 | 0.00410 | -16 | 5.03 |
-74 | 0.00559 | -14 | 7.25 |
-72 | 0.00762 | -12 | 8.69 |
-70 | 0.0104 | -10 | 10.4 |
-68 | 0.0140 | -8 | 12.4 |
-66 | 0.0187 | -6 | 14.7 |
-64 | 0.0248 | -4 | 17.5 |
-62 | 0.0328 | -2 | 20.7 |
-60 | 0.0430 | 0 | 24.4 |
-58 | 0.0565 | 2 | 28.2 |
-56 | 0.0735 | 4 | 32.5 |
-54 | 0.0948 | 6 | 37.4 |
-52 | 0.123 | 8 | 42.9 |
-50 | 0.157 | 10 | 49.1 |
-48 | 0.202 | 12 | 56.1 |
-46 | 0.257 | 14 | 63.9 |
-44 | 0.325 | 16 | 72.5 |
-42 | 0.410 | 18 | 82.5 |
备注:1、湿度按露点需达到-28%RH以下方可生产; | |||
2、注液手套箱内露点(湿度、温度)每隔半小时测量记录一次。 |
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